Details of Grant 

EPSRC Reference:	EP/C519329/1
Title:	Integration of Functional Ceramics in 3D MEMS
Principal Investigator:	Yeatman, Professor EM
Other Investigators:	Whatmore, Professor RW Kirby, Dr PB
Researcher Co-Investigators:
Project Partners:
Department:	Electrical and Electronic Engineering
Organisation:	Imperial College London
Scheme:	Standard Research (Pre-FEC)
Starts:	01 November 2004	Ends:	30 June 2006	Value (£):	88,565
EPSRC Research Topic Classifications:	Materials Characterisation Microsystems
EPSRC Industrial Sector Classifications:	Communications
Related Grants:
Panel History:
Summary on Grant Application Form
This exploratory project will examine the feasibility of, and lay the groundwork for, the integration of functional ferro-electric films in 3-dimensional MEMS devices. The last decade has seen an explosion of structures, devices and applications in the technology generally known as micro-electro-mechanical systems. or MEMS. Based on the micromachining of silicon and related materials, MEMS uses techniques from the semiconductor industry to fabricate sensors and actuators, and to integrate these with electronics to form complex microsystems. Advanced functional materials in the class known as ferroelectrics offer a wide range of useful properties (piezoelectric, pyroelectric. electro-optic, high permittivity) which can lead to a wide range of MEMS applications, including thermal imaging arrays, microfluidic systems for biomedical applications, and switches for high-speed radio circuits.Techniques now exist by which ferroelectric materials such as lead zirconate titanate (PZT) ceramics can be made in thin and thick film form on silicon wafers at relatively low temperatures. Techniques have also been developed for making true 3D microstructures that can be engineered into MEMS devices. The aim of this project is to integrate these two capabilities, to build the foundation for an entirely new level of functionality in microsystems.
Key Findings
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Potential use in non-academic contexts
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Impacts
Description This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk Summary Date Materialised
Sectors submitted by the Researcher
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Project URL:
Further Information:
Organisation Website:	http://www.imperial.ac.uk