| EPSRC Reference: |
EP/J009814/1 |
| Title: |
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS) |
| Principal Investigator: |
Williams, Professor OA |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
School of Physics and Astronomy |
| Organisation: |
Cardiff University |
| Scheme: |
First Grant - Revised 2009 |
| Starts: |
01 February 2012 |
Ends: |
31 January 2014 |
Value (£): |
100,220
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
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| EPSRC Industrial Sector Classifications: |
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| Related Grants: |
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| Panel History: |
| Panel Date | Panel Name | Outcome |
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06 Sep 2011
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EPSRC ICT Responsive Mode - Sep 2011
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Announced
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Summary on Grant Application Form |
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This project aims to develop high frequency, high quality factor Micro-Electro-Mechanical Systems (MEMS) from Nanocrystalline Diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young's modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth, pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
http://www.nanodiamond.co.uk |
| Further Information: |
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| Organisation Website: |
http://www.cf.ac.uk |