| EPSRC Reference: |
GR/G16809/01 |
| Title: |
NANOMETRE-SCALE ELECTRON BEAM LITHOGRAPHY MECHANISMS AND APPLICATIONS |
| Principal Investigator: |
Humphreys, Professor Sir C |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Materials Science & Metallurgy |
| Organisation: |
University of Cambridge |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
12 March 1990 |
Ends: |
11 March 1993 |
Value (£): |
74,764
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| Panel History: |
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Summary on Grant Application Form |
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No summary is available for this grant.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |