EPSRC Reference: |
GR/G37972/01 |
Title: |
SURFACE TOPOGRAPHY EVOLUTION ON ION BOMBARDED SILICON |
Principal Investigator: |
Carter, Professor G |
Other Investigators: |
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Researcher Co-Investigators: |
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Project Partners: |
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Department: |
Electronic and Electrical Engineering |
Organisation: |
University of Salford |
Scheme: |
Standard Research (Pre-FEC) |
Starts: |
01 March 1992 |
Ends: |
30 June 1995 |
Value (£): |
69,430
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EPSRC Research Topic Classifications: |
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EPSRC Industrial Sector Classifications: |
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Related Grants: |
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Panel History: |
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Summary on Grant Application Form |
1) to determine the physical processes responsible for the initiation and evolution of surface topography on ion bombardment sputtered silicon. 2) to determine irradiation conditions necessary to minimise topography evolution in order to optimise depth resolution in depth-composition analysis.
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Key Findings |
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Potential use in non-academic contexts |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
Summary |
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Date Materialised |
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Sectors submitted by the Researcher |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Project URL: |
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Further Information: |
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Organisation Website: |
http://www.salford.ac.uk |