| EPSRC Reference: |
GR/J05910/01 |
| Title: |
THE FUNCTIONALIZATION OF POLYSILANES FOR VLSI RESIST APPLICATIONS |
| Principal Investigator: |
Jones, Professor D |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Chemistry |
| Organisation: |
University of Kent |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 July 1993 |
Ends: |
30 June 1995 |
Value (£): |
75,177
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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To synthesize monomers for conversion to polysilanes, which will be functionalised with the intention of enhancing their performance as electron-beam resists for VLSI applications. Although the lithographic application is the ultimate aim, the project will achieve significant progress more generally within the area of the synthesis of novel polymeric materials.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.kent.ac.uk |