| EPSRC Reference: |
GR/K32722/01 |
| Title: |
QUANTITATIVE CHARACTERISATION OF 3D MICROSTRUCTURES: DOPANTS IN ELECTRONIC MATERIALS |
| Principal Investigator: |
El-Gomati, Professor M |
| Other Investigators: |
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| Department: |
Electronics |
| Organisation: |
University of York |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
05 June 1995 |
Ends: |
04 November 1998 |
Value (£): |
202,302
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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Summary on Grant Application Form |
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The quantitative 3D analysis of solid materials at high spatial resolution using AEA or SIMS presents a number of common problems. We propose to exploit instrumentation, methods computer codes and samples already available in York and Warwick and adapt them for 3D quantitative analysis. Instrumentation will include the uniquely powerful EVA 1010 magnetic sector for EVA 3000 quadruple SIMS instruments (Warwick) and the multispectral Auger microscope (York). At York, a large set of specially fabricated silicon structures with B, P and As dopants and a wide range of feature sizes will be bevelled with a Ga LMIG and studied by multi-imaging to be compared with SIMS imaging at Warwick. Computer codes developed at York will be adapted for SIMS at Warwick.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.york.ac.uk |