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Details of Grant 

EPSRC Reference: GR/K34917/01
Title: OPTIMIZATION AND CONTROL OF LASER PHOTOCHEMICAL DEPOSITION AND LASER CHEMICAL VAPOUR DEPOSITION.
Principal Investigator: Meech, Professor S
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Department: Chemistry
Organisation: University of East Anglia
Scheme: Standard Research (Pre-FEC)
Starts: 15 September 1994 Ends: 14 March 1997 Value (£): 80,351
EPSRC Research Topic Classifications:
Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
Remarkably little is known about the microscopic kinetics of LPD and LCVD. The lack of understanding in this area inhibits the optimisation of these processes, in terms of efficiency, track purity, contact resistance. This in turn prevents the full exploitation of laser deposition in interconnect technology/device manufacture. We propose novel experiments which will uncover the microscopic kinetics and point the way to full control of the deposition process, most notably in terms of power and photolysis wavelength, substrate temperature, most appropriate precursor etc.
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Organisation Website: http://www.uea.ac.uk