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Details of Grant 

EPSRC Reference: GR/K58067/01
Title: ELECTRICAL MODIFICATION OF ELECTRON ENERGY DIST. IN LOW TEMPERATURE PLASMAS
Principal Investigator: Braithwaite, Professor NS
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Department: Materials Engineering
Organisation: Open University
Scheme: Standard Research (Pre-FEC)
Starts: 01 November 1995 Ends: 31 October 1997 Value (£): 107,556
EPSRC Research Topic Classifications:
Plasmas - Technological
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
This project aims to investigate electrical means to tailor plasma properties so that more effective use can be made of particular plasma sources. This will be achieved by extracting electrons from one plasma and injecting them into another whose properties are to be modified.Discharge plasmas are now used for a wide variety of materials processing from large area polymer treatments to micro-machining. The efficiency and effectiveness of each process may benefit from a greater degree of control over the physical and chemical interactions throughout the plasma and these in turn can be manipulated through the electron energy distribution. The UK is a major supplier of plasma processing equipment.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
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Organisation Website: http://www.open.ac.uk