| EPSRC Reference: |
GR/K58333/01 |
| Title: |
MICROWAVE ASSISTED CHEMICAL VAPOUR DEPOSITION OF THIN FILM DIAMOND |
| Principal Investigator: |
May, Professor PW |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Chemistry |
| Organisation: |
University of Bristol |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
26 January 1996 |
Ends: |
25 January 1999 |
Value (£): |
64,028
|
| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
|
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
The proposal seeks minimum funding to complete a Microwave Plasma Reactor for the deposition of thin diamond films, and associated consumables necessary to maintain and operate the system for 3 years. Personnel requirements are one earmarked research studentship. The MW reactor is intended to enhance the efforts of the diamond growth team at Bristol, and to underpin the research of a number of other groups, both internal and external to Bristol, which depend upon a reliable supply of high quality diamond films. Specific projects intended for this reactor are (a) a detailed study of the chemistry of diamond CVD, especially with regard to F-, C1- and O-containing process gases. These gases should allow us to grow diamond at lower deposition temperatures, so greatly enhancing the range of substrate materials available for CVD. (b) Growth of very high purity 'electronic-grade' diamond films with (111) textured morphology, for use in cold cathods and field emitter devices. (c) Using our exisitng Molecular Beam Mass Spectrometer, a study of the gas phase composition during CVD will be undertaken. This will be done as a function of the feedstock gas composition, MW power, the substrate and its temperature - and will enable us to correlate the gas chemistry with the propoerties of the resulting diamond films. We will also be able to directly compare the chemistry occurring in the MW reactor with that already observed in our existing hot filament reactor, so allowing us to establish points of similarity (and difference) between the various gas activation schemes.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.bris.ac.uk |