| EPSRC Reference: |
GR/K66680/01 |
| Title: |
THE MANUFACTURE OF NEXT GENERATION PHOTOMASKS FOR ELECTRONIC DEVICES AND SENSORS |
| Principal Investigator: |
Cairns, Professor JA |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Electronic Engineering and Physics |
| Organisation: |
University of Dundee |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 November 1995 |
Ends: |
31 October 1998 |
Value (£): |
215,502
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| EPSRC Research Topic Classifications: |
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| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Electronics |
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| Related Grants: |
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| Panel History: |
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Summary on Grant Application Form |
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The proposal addresses a major industrial need: to produce high resolution photomasks to be used for the production of advanced electronic devices. It does so by synthesising a new class of organometallic compounds which have been designed to decompose to the metal under the influence of electron beams or lasers. Preliminary work has shown that sub-micron metal tracks can be produced. A collaborative arrangement has been established with Compugraphics International, to optimise the technology and to take it through to mass production.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.dundee.ac.uk |