| EPSRC Reference: |
GR/K78065/01 |
| Title: |
MICROELECTRONICS FABRICATION FACILITY |
| Principal Investigator: |
Kemhadjian, Professor H |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Electronics and Computer Science |
| Organisation: |
University of Southampton |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
12 April 1996 |
Ends: |
31 July 1998 |
Value (£): |
5,362,055
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Instrumentation Eng. & Dev. |
| Materials Processing |
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| Related Grants: |
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| Panel History: |
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Summary on Grant Application Form |
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The Southampton Facility has a record of research into silicon-based processes and devices going back at least 20 years during which time vast strides have been made in device and system performance. This rate of progress continues unabated, underpinning a multitude of applications in all walks of life. To continue solid research in this field requires continuing updating of equipment and processes which in turn requires a pool of skilled manpower. The proposal seeks continued funding of this infrastructure.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.soton.ac.uk |