| EPSRC Reference: |
GR/K93792/01 |
| Title: |
SURFACE MICROANALYSIS AND NON-DESTRUCTIVE 3D COMPOSITION DEPTH PROFILING |
| Principal Investigator: |
Prutton, Professor M |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Physics |
| Organisation: |
University of York |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 1996 |
Ends: |
30 September 1999 |
Value (£): |
204,678
|
| EPSRC Research Topic Classifications: |
| Materials Characterisation |
Surfaces & Interfaces |
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
New methods for the determination of 3D composition depth profiles below the surfaces of solids will be developed using the existing multi-imaging Scanning Auger microscope at York. Image sets using five different detectors simultaneously will be acquired from model and practical samples as the angle of incidence of an electron beam is varied. New computer software will be written to invert the contrast in the image sets so as to derive the 3D composition depth profiles. This multi-imaging approach will, for the first time, allow for the ill-conditioning of the inversion process. The scattering models and the software will be developed and checked using new reverse trajectory Monte-Carlo methods and interpretation of the shape of the electron spectra below Auger peaks. Model samples will be fabricated using semi-conductor technology and then the methods will be applied to practical device structures. The same methodology will be applied to metallurgic and catalytic samples.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.york.ac.uk |