| EPSRC Reference: |
GR/K97745/01 |
| Title: |
LASER-ASSISTED BATCH ASSEMBLY OF MICROSYSTEMS |
| Principal Investigator: |
Holmes, Professor A |
| Other Investigators: |
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| Department: |
Electrical and Electronic Engineering |
| Organisation: |
Imperial College London |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
16 January 1996 |
Ends: |
15 January 1997 |
Value (£): |
26,251
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Summary on Grant Application Form |
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The research will investigate a novel laser-assisted batch assembly technique with applications in the field of microsystems technology. Arrays of component parts will be produced on UV-transparent carriers with intermediate polymer sacrificial layers. Each carrier will be positioned in turn over an array of partially assembled devices, and the components released by photo-ablation of the sacrificial layer from the reverse side of the carrier. The laser-assisted assembly process will be developed initially using metallic parts fabricated directly on quartz carriers. This work will aim to specify materials and conditions for a basic laser release process. Cleaning of the released parts to remove ablation debris will then be addressed. The combined process will be used to fabricate an array of simple wobble motors. Finally, the feasibility of using carriers with surface layers of epoxy resin to pick up arrays of components from silicon substrates will be investigated.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.imperial.ac.uk |