| EPSRC Reference: |
GR/L06805/01 |
| Title: |
DIAMOND FIELD EMITTERS FOR NANOLITHOGRAPHY |
| Principal Investigator: |
Foord, Professor J |
| Other Investigators: |
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| Department: |
Oxford Chemistry |
| Organisation: |
University of Oxford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 1996 |
Ends: |
30 June 1997 |
Value (£): |
14,622
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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A hybrid technology is to be explored which combines the throughput advantages of photolithography with the resolution capabilities of electron beam lithography for the formation of nanostructures. The formation of patterns of electron emitters will be investigated by ion or electron beam bombardment of thin film diamond. It is proposed that these could then be used as a mask plate for electron beam lithography.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ox.ac.uk |