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Details of Grant 

EPSRC Reference: GR/L24502/01
Title: SUB-MICRON OPTICAL LITHOGRAPHY AT IMPERIAL COLLEGE
Principal Investigator: Thorton, Dr T
Other Investigators:
Toumazou, Professor C Joyce, Professor BA
Researcher Co-Investigators:
Project Partners:
Department: Electrical and Electronic Engineering
Organisation: Imperial College London
Scheme: JREI
Starts: 10 June 1997 Ends: 09 June 1998 Value (£): 43,000
EPSRC Research Topic Classifications:
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
A state-of-the-art, sub-micron optical mask aligner will enhance the existing fabrication facilities at Imperial, allowing the College to stay at the leading edge of technology for the next ten years. It will be used in a number of inter-disciplinary research projects including novel circuit design, microsystems technology, studies of high temperature superconductors and advanced semiconductors. The aligner will also serve as a focus for activity in the soon to be established Centre for Electronic Materials. In this way it will encourage inter-departmental collaboration within the College.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
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Further Information:  
Organisation Website: http://www.imperial.ac.uk