Details of Grant 

EPSRC Reference:	GR/L26414/01
Title:	SUB-MICRON PROCESSING OF NEW MATERIALS FOR MICROSYSTEMS
Principal Investigator:	Gardner, Professor JW
Other Investigators:	Hutchins, Professor D Chetwynd, Professor DG
Researcher Co-Investigators:
Project Partners:	University of Warwick
Department:	Sch of Engineering
Organisation:	University of Warwick
Scheme:	JREI
Starts:	21 March 1997	Ends:	20 March 1999	Value (£):	27,922
EPSRC Research Topic Classifications:	Materials Processing
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:
Summary on Grant Application Form
It is proposed to improve microfabrication facilities in order to undertake research into the application of new materials (ceramics, polymers and metallics) for micro-electromechanical systems. The equipment will also enable production of more subtly controlled precision surfaces for calibration of characterisation equipment and for direct exploitation in instrument and control devices. Enhanced performance in micro-devices which the Warwick Centre is especially well placed to study, is of great technical and commercial significance. Since this is research into enabling technologies, it must maintain a broad view of potential applications. However, initial work will be concerned with applying polymers and special surface processing to microsensors and actuators, ultrasonic transducers and biotechnological manipulators.
Key Findings
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Potential use in non-academic contexts
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Project URL:
Further Information:
Organisation Website:	http://www.warwick.ac.uk