| EPSRC Reference: |
GR/L54011/01 |
| Title: |
SIGE FOR MOS TECHNOLOGY |
| Principal Investigator: |
Kearney, Professor M |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Electronic, Electrical & Systems Enginee |
| Organisation: |
Loughborough University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 August 1997 |
Ends: |
31 July 2000 |
Value (£): |
36,640
|
| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
|
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
A co-ordinated research activity involving principally five Universities (Glasgow, Imperial College (London), Newcastle, Southampton and Warwick) and industry (GPS, DRA, Siemens and TMA) concerned with the evaluation and maximisation of the performance enhancements accessible through incorporating SiGe layers in Si MOSFET devices. An assessment of the possibility of using a pseudomorphic SiGe/Si structure to improve p-channel device performance to match that of the n-channel device in CMOS is an important early objective. The principal focus is on n- and p-channel devices produced on relaxed SiGe buffer layers (virtual substrates (VS)) which have already been shown to be capable of yielding very significant improvements in deep submicron CMOS performance, The challenge here will be to produce a commercially viable defect free VS technology and three growth centres will have a substantial activity in this area. Process development will be an important theme of the programme with e-beam lithography enabling deep submicron feature sizes to be accessed. There will be a strongly interactive modelling activity to optimise the vertical and lateral architecture of the device. Important deliverables will be demonstrators showing the performance advantages of using SiGe devices in digital CMOS, basic micro-power circuits and in RF applications.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.lboro.ac.uk |