| EPSRC Reference: |
GR/L73906/01 |
| Title: |
ROPA: COMBINED THICK - FILM / MICROMACHINED SENSOR STRUCTURES |
| Principal Investigator: |
White, Professor NM |
| Other Investigators: |
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| Department: |
Electronics and Computer Science |
| Organisation: |
University of Southampton |
| Scheme: |
ROPA |
| Starts: |
19 January 1998 |
Ends: |
18 July 2000 |
Value (£): |
95,718
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| EPSRC Research Topic Classifications: |
| Instrumentation Eng. & Dev. |
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| EPSRC Industrial Sector Classifications: |
| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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The aim of this proposed programme of work is to complete a fundamental investigation into the combination of thick-film and silicon technologies. The main objectives are to optimise paste formulations, to fully characterise the process, to define design rules regarding the combination of the technologies and to fabricate prototype sensor structures. One of the major experimental tasks is to deposit a specially formulated piezoelectric thick-film based on lead zirconate titanate (PZT) onto a silicon substrate. This will form the bases of many potential structures for micromachines sensors and actuators.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.soton.ac.uk |