| EPSRC Reference: |
GR/L82120/01 |
| Title: |
PLASMA DIAGNOSTICS USING OPTICAL EMISSION AND CAVITY RING DOWN SPECTROSCOPY |
| Principal Investigator: |
John, Professor P |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Sch of Engineering and Physical Science |
| Organisation: |
Heriot-Watt University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 September 1998 |
Ends: |
31 May 2002 |
Value (£): |
177,151
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| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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The programme will measure the concentration of key intermediate species present in rf and microwave plasmas employed for the deposition of: i. Amorphous and polycrystalline silicon and associated alloys ii. Diamond-like and polycrystalline diamondUsing cavity ring down spectroscopy. The same technique will be employed to measure the concentrations of species during the H-atom etching of a variety of semiconductors. CRD and OES will be compared as non-invasive diagnostics for large area technological plasmas.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.hw.ac.uk |