| EPSRC Reference: |
GR/M20532/01 |
| Title: |
DIODE LASER DIAGNOSTICS OF TECHNOLOGICALLY IMPORTANT PLASMAS |
| Principal Investigator: |
Hancock, Professor G |
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| Department: |
Oxford Chemistry |
| Organisation: |
University of Oxford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
24 September 1998 |
Ends: |
23 May 2002 |
Value (£): |
201,379
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| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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Diode laser systems are to be constructed for the observation of reactive species by absorption in plasmas. Two approaches will be carried out. First, electronic transitions in radicals will be detected by making use of the blue and uv output from diode lasers whose frequencies have been upconverted from the near ir by efficient frequency doubling. Secondly, first overtone transitions of C-H stretches will be sought in tuned resonant cavities making use of the diode fundamental output in the near ir. After characterisation of the detection scheme by means of pulsed radical production in a separate reaction vessel, measurements will be made of species densities (spatially resolved with respect to height above an electrode surface), internal and translational energies, fluxes to surfaces and loss rates on them. The initial studies will concentrate on the properties of the CH3 radical in CH4 /H2 plasmas of the kind used for diamon deposition and InP etching. The data will be compared with those predicted from spatially dependent models of the plasma chemistry.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ox.ac.uk |