| EPSRC Reference: |
GR/M91754/01 |
| Title: |
(JREI) PIEZOELECTRIC AND FERROELECTRIC DEVICE FABRICATION FACILITY |
| Principal Investigator: |
Kirby, Dr PB |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Industrial and Manufacturing Scie |
| Organisation: |
Cranfield University |
| Scheme: |
JREI |
| Starts: |
01 April 2000 |
Ends: |
31 March 2003 |
Value (£): |
82,285
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| EPSRC Research Topic Classifications: |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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| Related Grants: |
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| Panel History: |
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Summary on Grant Application Form |
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The project will entail the purchase of a Stylus Surface Profiler, Plasma Asher and a Reactive Ion Etcher. These items will enhance existing research into ferroelectric thin films, and the processing of micromechanical silicon structures, especially thin film bulk acoustic wave resonators. The proposed equipment purchases will allow the development of processing/fabrication technologies to make use of the piezoelectric, pyroelectric and dielectric properties of thin/thick functional, especially ferroelectric films, on silicon microstructures, with the aim of addressing the burgeoning need for miniature sensors.This equipment will also make a significant contribution to the precision preparation of ceramic and metal surfaces using 'ductile grinding, and to thermal coatings technologies.The 50% contribution from an external sponsor towards the cost of the proposed equipment is from an industrial source.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cranfield.ac.uk |