| EPSRC Reference: |
GR/N06489/01 |
| Title: |
THE DEVELOPMENT OF FOCUSED ION BEAM NANOFABRICATION FOR MATERIALS CHARACTERISATION AND DEVICE PROCESSING |
| Principal Investigator: |
Blamire, Professor M |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Materials Science & Metallurgy |
| Organisation: |
University of Cambridge |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
23 April 2000 |
Ends: |
22 April 2003 |
Value (£): |
245,529
|
| EPSRC Research Topic Classifications: |
|
| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
The EPSRC-funded focused ion beam (FIB) workstation has become a mainstay for many aspects of work in the Cambridge University. As we have gained familiarity with the equipment, we have been able to devote more effort towards exploring new methods of suing its capabilities. It has become clear that established techniques for materials characterisation and nanofabrication have scope for dramatic development and improvement. For example although the fabrication of cross-sectional TEM specimens is currently the largest application area of research FIB systems, the degree of material damage induced is poorly understood and neither systematic characterisation of the degradation or the development of methods for reducing it have been carried out. The aim of this new proposal is to concentrate on the development of such novel aspects of FIB use, to determine the basic science behind some of the existing processes, and to use this understanding to optimise nanofabrication techniques. In addition, funding of this proposal will enable the continued operation of an outstandingly successful piece of research equipment.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.cam.ac.uk |