| EPSRC Reference: |
GR/N25190/01 |
| Title: |
ROPA: NANOFABRICATION BY A COMBINATION OF A MOVING SHADOW MASK AND SCANNING PROBE METHODS - NANOSTENCIL |
| Principal Investigator: |
Welland, Professor M |
| Other Investigators: |
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| Department: |
Engineering |
| Organisation: |
University of Cambridge |
| Scheme: |
ROPA |
| Starts: |
30 October 2000 |
Ends: |
29 October 2002 |
Value (£): |
132,262
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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| Panel History: |
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Summary on Grant Application Form |
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This proposal explored the potential of a new method for nanofabrication of complex structures and devices based on the positional control of a mask through which material is evaporated. The mask itself forms part of an atomic force microscope so that the position of the mask over any surface can be defined better than 1nm. As the mask is dynamically moved over a surface material evaporated through a pattern of holes in the mask forms 3-dimensional structures with dimensions down to 1nm. In-situ inspection of structures is effected by using the imaging capability of the atomic force microscope.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |