| EPSRC Reference: |
GR/N66773/01 |
| Title: |
APPLICATIONS OF OPTICAL REFLECTOMETRY IN MOVPE OF GROUP III NITRIDE SEMICONDUCTORS |
| Principal Investigator: |
Watson, Dr I |
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| Department: |
Physics |
| Organisation: |
University of Strathclyde |
| Scheme: |
Fast Stream |
| Starts: |
13 November 2000 |
Ends: |
12 November 2002 |
Value (£): |
61,317
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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The proposed work will apply optical reflectometry to monitoring growth of group III nitride semiconductors by metal organic vapour phase epitaxy (MOVPE). This non-perturbative monitoring technique has proven ability to make real-time, in situ studies of MOVPE processes, yielding important mechanistic insights. The overall aim of this programme is to develop the capabilities of a recently commissioned MOVPE system for producing device-quality material, simultaneously demonstrating novel applications of the reflectrometry technique. The programme will also employ a number of ex situ characterisation techniques to augment the information obtained from in situ monitoring. Initial work will apply single-wavelength reflectometry to monitoring heteroepitaxial growth of gallium nitride on sapphire, building on previous work on this topic. A further work package will extend this technique to monitoring lateral epitaxial overgrowth, which is currently the most important route to dislocation-free layers of nitride semiconductors. Finally, spectroscopic and multi-wavelength reflectrometry will be used to study growth of ternary and quaternary indium-containing alloys. The aim of this work package will be to develop near-simultaneous monitoring of the thickness and composition of alloy layers.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.strath.ac.uk |