Details of Grant 

EPSRC Reference:	GR/R08063/01
Title:	Laser Processing of Thin Films For Large Area Electronics
Principal Investigator:	Silva, Professor SRP
Other Investigators:	Shannon, Professor J
Researcher Co-Investigators:
Project Partners:	Coherent UK Ltd J L S Designs Ltd Megatech Ltd Philips (UK)
Department:	Sch of Electronics & Physical Sciences
Organisation:	University of Surrey
Scheme:	JREI
Starts:	31 August 2001	Ends:	31 March 2003	Value (£):	126,455
EPSRC Research Topic Classifications:	Materials Processing
EPSRC Industrial Sector Classifications:	Electronics
Related Grants:
Panel History:
Summary on Grant Application Form
Laser processing of materials for electron applications on commercial basis by industry will take place in the next 2 to 3 years. Before then there are a number of issues that need to be better understood in the relatively mature areas of laser processing such as laser crystallisation of amorphous silicon. In addition, a whole host of new opportunities in laser crystallisation of other material systems. We will specifically concentrate on laser annealing of wide band gap semiconductors, namely polycrystalline diamond, gallium nitride and silicon carbide thin films. We extend our extensive knowledge on deposition, characterisation and device fabrication experience in the four amorphous materials systems silicon (a-Si), gallium nitride (a-GaN), carbon (a-C) and silicon carbide (a-SiC) for their use as thin nano/poly crystalline materials. The second branch of the proposed research will be in pulsed laser deposition (PLD). Here we will be concentrating on depositing the amorphous forms of thin films namely, a-C, a-Si, a-SiC. III-V compounds such as a-GaN and a-InGaN etc. utilising the advantageous properties of the PLD system for thin film growth. PLD allows for much higher growth rates, hydrogen free environments (compared to CVD), high energy plasma plume that is nearly 100% ionised, high precision in film thickness and composition. The overriding theme of the exercise being the use of these materials foe advanced devices, particularly those relating to large electronics and the human-machine interface.
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Organisation Website:	http://www.surrey.ac.uk