| EPSRC Reference: |
GR/R11483/01 |
| Title: |
Development of An Enhanced Magnetron Sputtering System |
| Principal Investigator: |
Kelly, Professor P |
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| Department: |
Inst for Materials Research |
| Organisation: |
University of Salford |
| Scheme: |
Fast Stream |
| Starts: |
01 March 2001 |
Ends: |
29 February 2004 |
Value (£): |
62,674
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Summary on Grant Application Form |
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The CFUBMS process has become established as the process of choice for the deposition of a wide range of industrially important coatings. However, despite its successes, there are inherent limitations in the current process. Chiefly, the ion-to-atom ratio incident at the substrate, which has a profound effect on coating properties, cannot readily be varied using present technology. Consequently, film properties may not be optimal. The proposed research aims to overcome this limitation though the development of an enhanced sputtering system. The intention is to incorporate a newly developed type of gridless linear ion source into a CFUBMS system, and to use this ion source to control the energy delivered to the growing film. This novel approach has the potential to greatly improve the flexibility of control of the growth parameters in a CFUBMS system. A full characterisation study of the new, enhanced sputtering system will be carried out. Initially, metallic films will be investigated. The knowledge gained will improve on the current understanding of the factors influencing the structure and properties of coatings formed using ion-assisted processes. Following this, specific, commercially important ceramic coatings will be investigated. By carrying the additional energy supplied by the ion source during the deposition process, through-thickness gradations in properties will be achieved. In this manner it is hoped to demonstrate that the enhanced CFUBMS system can be used to produce ceramic films in which the properties are optimised, both in terms of adhesion and in terms of the specific functional properties of the film.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.salford.ac.uk |