| EPSRC Reference: |
GR/R17447/01 |
| Title: |
In-Situ Studies of Activated Cvd Processes Using Nir Diodel Laser Spectroscopy-A Feasibility Study |
| Principal Investigator: |
Sheel, Professor D |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Inst for Materials Research |
| Organisation: |
University of Salford |
| Scheme: |
Fast Stream |
| Starts: |
01 August 2001 |
Ends: |
31 October 2002 |
Value (£): |
60,782
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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Combustion CVD and corona discharge CVD are two techniques involving chemical vapour deposition from a (non-thermally) activated process, which are potentially capable of producing CVD coatings at atmospheric pressures, under conditions of either continuous or batch processing, where high substrate temperatures are not required. Thus they have the potential for use in the preparation of (possibly large areas) of coatings on delicate materials, which would otherwise degrade at the high temperatures normally required for conventional CVD growth. This work sets out to establish whether near IR diode laser spectroscopy may be used to monitor these processes in order to provide information as to the mechanisms involved in the activation processes. In addition, attempts will be made to correlate absorption spectra from various species with the efficacy of the growth processes, in order to establish whether this method might form the basis of a process control or monitoring system at some later stage.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.salford.ac.uk |