| EPSRC Reference: |
GR/R36978/01 |
| Title: |
Research visits to Delft institute of microelectronics and sub-micron technology (DIMES), The Netherlands |
| Principal Investigator: |
Cheung, Professor R |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Overseas Travel Grants Pre-FEC |
| Starts: |
01 June 2001 |
Ends: |
31 May 2003 |
Value (£): |
9,497
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| EPSRC Research Topic Classifications: |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
Energy |
| Sports and Recreation |
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| Panel History: |
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Summary on Grant Application Form |
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The proposed research sets out to strengthen the existing collaboration between the Dept. of EEE at the University of Edinburgh and Technical University of Delft. In addition, it aims to develop an optimised generic processing technology to provide a fundamental basis for the future development of high temperature/power electronics and microelectromechanical systems (MEMS) in silicon carbide. The excellent electrical, mechanical and chemical properties of SIC, as well as its high electrical breakdown field offers exciting application possibilities in harsh environments. However, many of the properties that make SiC attractive for MEMS and electronic device applications, also make it a difficult material to process and micromachine. In particular, its chemical inertness provides the ultimate challenge for pattern transfer into the substrate. For example, no reliable wet etchant has been found for SIC. This project aims to develop a fast (hundreds of nm/min.) dry etch process with high selectivity in silicon carbide (SIC) for high power/temperature electronics and microelectromechanical systems (MEMS).
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ed.ac.uk |