Details of Grant 

EPSRC Reference:	GR/R58802/01
Title:	Feasibility Study on Fabrication of a Micro Engine Using Deep Etching Processes of MEMS Technologies
Principal Investigator:	Jiang, Professor K
Other Investigators:	Ward, Dr M Prewett, Professor PD
Researcher Co-Investigators:
Project Partners:	Gasparin Co2 Motors U A V Engines Ltd
Department:	Mechanical Engineering
Organisation:	University of Birmingham
Scheme:	Fast Stream
Starts:	01 January 2002	Ends:	30 June 2003	Value (£):	62,683
EPSRC Research Topic Classifications:	Microsystems
EPSRC Industrial Sector Classifications:	Aerospace, Defence and Marine Chemicals Electronics Healthcare Pharmaceuticals and Biotechnology
Related Grants:
Panel History:
Summary on Grant Application Form
Proposed is a feasibility study on the fabrication of a micro Wankel engine using the deep etching processes of MEMS technology. The micro Wankel engine will be powered by liquid C02 in this project. This will enable the research to concentrate on the key technology of fabrication of micro engine parts. The deep etching process to be employed is the time multiplexed deep etching technique using the STS Multiplex Inductive Coupled Plasma Etch System. The engine is designed for the convenience of microfabrication, and measures have been planned to prevent leakage. BESOI silicon wafers will be used for making engine parts. The research work will take place in the recently updated dean rooms at the University of Birmingham. The clean rooms are equipped with an STS Multiplex Inductive Coupled Plasma Etch System and an EBL 100 electron beam lithography system both purchased with JERI funds. A focused ion beam microfabrication system is to be added in late 2001. External collaborators will include Rutherford Appleton Laboratory, UAV Engines, and Gasparin C02 Motory. The three investigators combine expertise in areas from micro fabrication to mechanical design technologies. It is expected that after carefully conducted research, this project will offer a clear conclusion on the feasibility of using deep etching technology for fabrication of micro machines and micro machine parts. It is our intention that the cryogenic micro engine will be running by the end of the project, representing a significant advance in micropower systems.
Key Findings
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Further Information:
Organisation Website:	http://www.bham.ac.uk