| EPSRC Reference: |
GR/R60171/01 |
| Title: |
Novel Precursor Chemistry for Ferroelectric Thin-film Memory devices |
| Principal Investigator: |
Scott, Professor J |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Earth Sciences |
| Organisation: |
University of Cambridge |
| Scheme: |
ROPA |
| Starts: |
01 October 2001 |
Ends: |
30 September 2003 |
Value (£): |
156,934
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
Materials Synthesis & Growth |
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Summary on Grant Application Form |
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Unusual metal-alkoxide precursors will be employed in a mist chemical vapour deposition (liquid-source CVD) system to produce ferroelectric (FE) thin films. The new work will develop deposition techniques for non-planar substrates, including porous silicon photonic crystals. Special emphasis will be on the self-patterning of nanophase cells, discovered by the author in 1997, and on suitable ferroelectric gate and buffer layer combinations for < 0.2 micron gatewidth ferroelectric field effect transitors (FETs).
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |