Details of Grant 

EPSRC Reference:	GR/R71726/01
Title:	Cavity ring down probing of a dc arc jet and a laser ablation plume used for thin film deposition
Principal Investigator:	Orr-Ewing, Professor A
Other Investigators:	Ashfold, Professor M
Researcher Co-Investigators:
Project Partners:
Department:	Chemistry
Organisation:	University of Bristol
Scheme:	Standard Research (Pre-FEC)
Starts:	01 October 2002	Ends:	30 September 2005	Value (£):	174,718
EPSRC Research Topic Classifications:	Plasmas - Technological
EPSRC Industrial Sector Classifications:	Manufacturing Electronics
Related Grants:
Panel History:
Summary on Grant Application Form
CRDS will be used to probe two very different environments used for thin film deposition. These are a do arc jet for diamond film growth and a laser ablated plume, which is a versatile method for deposition of a variety of films on a range of substrates. CRDS will permit spatially resolved measurements of temperatures and concentrations of several radicals implicated in the thin film growth including C2, CH, CH3, NH, CN, SH, CS, BH and BC. A key advantage of CRDS is that it provides absolute concentrations of species probed, thereby permitting critical comparisons with models of the film growth mechanisms, and correlations between radical concentrations and film properties. Films will be studied using Raman, XPS, SIMS, Auger, and SEM methods. Measurements will be made using tuneable, pulsed laser CRDS of the C2 and CH radicals in a do arc jet operating with a feedstock gas mixture of CH4/H2/Ar, with spatial resolution along and across the jet permitting reconstruction of the 3-D concentration distributions and temperature profiles, and examination of the shock-front region in front of the substrate. Subsequent work will examine how N and S affect the gasphase chemistry and are incorporated into the films. Laser ablated plumes will be studied for the first time by CRDS which offers the enormous advantage over optical emission as a means of probing the majority dark ground state species present in the plume. Radicals and atoms will be probed, and the effects of a low background pressure of gas in the ablation chamber on their concentrations and the film composition will be explored.
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Organisation Website:	http://www.bris.ac.uk