Details of Grant 

EPSRC Reference:	GR/R97986/01
Title:	Electron Holography of Semiconductor Junctions: Developing a Reliable Methodology for the Microelectronics Industry
Principal Investigator:	Midgley, Professor PA
Other Investigators:	Dunin-Borkowski, Professor R Barnes, Professor C
Researcher Co-Investigators:	Dr W Saxton
Project Partners:	Hungarian Academy of Sciences QinetiQ University of Cambridge University of Limerick University of Surrey
Department:	Materials Science & Metallurgy
Organisation:	University of Cambridge
Scheme:	Standard Research (Pre-FEC)
Starts:	01 October 2002	Ends:	30 September 2005	Value (£):	263,342
EPSRC Research Topic Classifications:	Materials Characterisation
EPSRC Industrial Sector Classifications:	Electronics
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Panel History:
Summary on Grant Application Form
The proposed research involves the development and application of off-axis electron holography in the field emission gun transmission electron microscope to allow electrostatic dopant potentials to be measured quantitatively and accurately in working semiconductor devices at high spatial resolution, in both two and three dimensions. The research will tackle the many problems that have plagued advances in the measurement of junction profiles. These include resolving the presence of inversion or depletion layers at the sample surface, and eliminating the effects of strain and sample thickness variations on the recordrd phase image. A new high tilt biasing holder will allow junctions to be studied with an electrical bias applied to them in situ, allowing changes in dopant potential to be followed and correlated with device characteristics. As feature sizes are reduced, the three-dimensional nature of the electrostatic fields in such samples will become increasingly important. Using the high tilt capability of the holder, electron tomography experiments will be performed to allow the full three-dimensional reconstruction of the electrostatic potentials in the samples. Results will be modelled using dedicated software so that a full understanding can be achieved.
Key Findings
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Organisation Website:	http://www.cam.ac.uk