Details of Grant 

EPSRC Reference:	GR/S12159/01
Title:	Faraday Fast Track proposal: Actice Packaging for Optical and Electronic Microsystems
Principal Investigator:	Williams, Professor JA
Other Investigators:	Milne, Professor WI Fleck, Professor N Lu, Dr T
Researcher Co-Investigators:
Project Partners:	Agilent Technologies Ltd Micro Circuit Engineering
Department:	Engineering
Organisation:	University of Cambridge
Scheme:	Faraday (PreFEC)
Starts:	01 July 2003	Ends:	30 June 2006	Value (£):	241,025
EPSRC Research Topic Classifications:	Electronic Devices & Subsys. Materials Processing Microsystems
EPSRC Industrial Sector Classifications:	Electronics
Related Grants:
Panel History:
Summary on Grant Application Form
The main objective is to develop a design methodology for optical and electrical activating connectors in order to allow for material fabrication selection for various connector geometrics. The main aims are to develop actuating topologies in order to locate microclips. In collaboration with the industrial partners MCE, Newmarket and Agilent, Ipswich, three classes of actuating connector will be explored: (a) actuation for small adjustments such as the active alignment of optical components such as the switching of components before fixing in position; (b) large actuation for major adjustments where precision is less critical; (c) actuation for repeated precise operations such as the switching of components between optical channels. The manufacturing methods for active microclips will include the production of bi-morph layers using FCVA, laser machining and RIE of diamond-like carbon and silicon nitride, and reactive ion etching of silicon. In collaboration with Imperial College, London and Tokyo Tech, Japan, test structures will be designed to evaluate the material properties. In-situ tests within the scanning electron microscope (SEM) will be developed in order to probe for the possible delamination of the active layer from its passive substrate, determine the level of growth and residual stresses in the layers, and to measure the performance and reliability of the actuator.
Key Findings
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Potential use in non-academic contexts
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Further Information:
Organisation Website:	http://www.cam.ac.uk