| EPSRC Reference: |
GR/S26682/01 |
| Title: |
Diagnostic study of pulsed magnetron plasmas: a route to advanced engineering coatings |
| Principal Investigator: |
Kelly, Professor P |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Inst for Materials Research |
| Organisation: |
University of Salford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2003 |
Ends: |
16 January 2005 |
Value (£): |
131,773
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| EPSRC Research Topic Classifications: |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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It is undisputed amongst experts that pulsed plasmas have initiated a new and exciting era in surface engineering technologies, particularly in the pulsed magnetron sputtering of dielectric materials. Despite this, in common with other technological plasmas, understanding of the underlying science lags behind the applications, and there is currently very little knowledge of the fundamental plasma conditions required to optimise the structure and properties of oxide thin films.The key aim of this project is to give a much better understanding of key phenomena present in these systems, such as electron and ion transport in the complex magnetic field, fast particle generation and concomitant electron plasma heating, ion energy and power deposition at the substrate. Importantly, we will determine how these phenomena affect the deposition process and derive experimental 'metrics' (plasma parameters at the substrate and/or their combination), which determine the structure and properties of the films in the pulsed process. We will then use the physics knowledge gained to engineer thin films with advanced properties.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.salford.ac.uk |