Details of Grant 

EPSRC Reference:	GR/S45027/01
Title:	Ferroelectric Thin Films for MEMS - Electrical and mechanical properties
Principal Investigator:	Kirby, Dr PB
Other Investigators:	Whatmore, Professor RW
Researcher Co-Investigators:
Project Partners:	National Physical Laboratory QinetiQ Servocell (PBT LTD)
Department:	Sch of Industrial and Manufacturing Scie
Organisation:	Cranfield University
Scheme:	Standard Research (Pre-FEC)
Starts:	01 October 2003	Ends:	30 September 2006	Value (£):	134,220
EPSRC Research Topic Classifications:	Materials Characterisation Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:	Electronics
Related Grants:	GR/S45034/01
Panel History:
Summary on Grant Application Form
Ferroelectric thin films are critical to the emerging nano-technologies of microelectromechanical system (MEMS) and nonvolatile ferroelectric memories (FeRAMs). Understanding of the electro-mechanical behaviour is essential for both device design and for ensuring reliability. The proposed research using nanoindentation will lead to the development of new, high spatial resolution, techniques for the characterisation of their electromechanical properties which can be made directly onto laboratory materials or manufactured devices. This will require the development of models to describe the interaction of complex stress fields with the anisotropic properties of the films. The results from this work will improve our understanding of the relationships between the elastic and piezoelectric properties and the processing, microstructure, crystal structure, crystallographic orientation and electrical properties of perovskite FE thin films. Ferroelectric and ferroelectric relaxor compositions will be studied and different crystal substrates (e.g. platinised silicon and MgO or SrTi03 substrates). Use this knowledge to develop improved materials. It will also provide the elastic data that is required to optimise the design of MEMS devices. The proposed research involves collaboration between Queen Mary University of London (QMUL) and Cranfield University, and brings together considerable expertise to provide new solutions in this increasingly important area.
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Project URL:
Further Information:
Organisation Website:	http://www.cranfield.ac.uk