Name:	Dr L Haworth
Organisation:	University of Edinburgh
Department:	Sch of Engineering
Current EPSRC-Supported Research Topics:

Current EPSRC Support

There is no current EPSRC Support

Previous EPSRC Support

GR/T11531/01 Optimisation of sub-100nm copper-interconnect & photoresist tracks for high-density IC fabrication metrology (C) GR/S12838/01 PLATFORM: PLATFORM GRANT TO SUPPORT THE DEVELOPMENT OF MICRO/NANO TECHNOLOGY ACROSS A RANGE OF DISCIPLINES (C) GR/M33280/01 MICRO-CAVITY TECHNIQUES FOR GETTERING TRACE IMPURITIES IN ADVANCED SEMICONDUCTOR DEVICES (P) GR/L81000/01 DEVELOPMENT OF TEST STRUCTURES FOR CHARACTERISING IC TECHNOLOGIES (C) GR/H52221/01 TEACHING COMPANY SCHEME WITH EKC TECHNOLOGY LTD AND EDINBURGH UNIVERSITY (C) GR/G28062/01 DEVELOPMENT AND SUPPORT FOR THE EDINBURGHMICROFABRICA TION FACILITY (C) GR/F30499/01 DEVELOPMENT AND SUPPORT FOR THE EDINBURGH MICROFABRICATION FACILITY (C)

Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator