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| Name: |
Dr S Laverty |
| Organisation: |
University of Ulster |
| Department: |
School of Engineering |
| Current EPSRC-Supported Research
Topics: |
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| Current EPSRC Support |
| There is no current EPSRC Support |
| Previous EPSRC Support |
| GR/L83349/01 | A STUDY OF AN ARGON/CHLORINE INDUCTIVELY COUPLED PLASMA FOR PLASMA ETCH APPLICATIONS | (C) |
| GR/J35412/01 | CHARACTERIZATION OF CONTIONOUS AND PULSED RF PLASMAS FOR TIN OXIDE ETCH RATE ENHANCEMENT | (C) |
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Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator
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