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Details of Grant 

EPSRC Reference: EP/C534778/1
Title: Maskless Non-Planar Photolithography (3DML)
Principal Investigator: Purvis, Professor A
Other Investigators:
Johnson, Dr S
Researcher Co-Investigators:
Dr R McWilliam
Project Partners:
GSPK Design Ltd Intelligent Micro Patterning
Department: Engineering and Computing Sciences
Organisation: Durham, University of
Scheme: Standard Research (Pre-FEC)
Starts: 01 March 2006 Ends: 31 August 2009 Value (£): 242,282
EPSRC Research Topic Classifications:
Electronic Devices & Subsys. Materials Processing
Microsystems
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
EP/C53476X/1
Panel History:  
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