| EPSRC Reference: |
GR/J36822/01 |
| Title: |
SIRM STUDIES OF SMALL PRECIPITATE PARTICLES WITHIN BULK SEMICONDUCTOR WAFERS TO DEDUCE NON-DESTRCTVTY ETC.. |
| Principal Investigator: |
Booker, Dr GR |
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| Department: |
Materials |
| Organisation: |
University of Oxford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 January 1994 |
Ends: |
30 June 1995 |
Value (£): |
72,821
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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Summary on Grant Application Form |
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The present SIRM will be modified to incorporate the high-brightness Nd: YAG laser and to allow the detection of light scattered through a wide range of angles so as to give polar diagrams. A combination of Nomarski prisms, waveplates and polarisation analysers will be installed to enable phase contrast, in addition to intensity contrast, images to be obtained. The laser light intensity will be modulated and the detector signal will be amplified by a phase sensitive detector amplifier. The performance of the new system will be tested and optimised using Si wafers containing well characterised oxide precipitate particles. Light scattering theory will be applied to calculate the polar diagrams that would occur when using amplitude or phase contrast for specific illuminating conditions and particle shapes and sizes, particle orientation and particle material, eg plates of SiO2 oriented on the three {100} planes in a Si wafer. The calculated results will be compared with the experimental results until good agreement is obtained. Similar procedures will then be used for particles with other geometries and materials. The combination of the improved SIRM and the newly developed assessment procedure will be applied to the important technological case of the early stages of oxygen precipitation in Si, and possibly precipitation in other systems.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ox.ac.uk |