| EPSRC Reference: |
GR/J78471/01 |
| Title: |
AN IMPROVED OPTIMISATION STRATEGY FOR SEMICONDUCTOR PROCESSES |
| Principal Investigator: |
Walton, Professor AJ |
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| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 January 1995 |
Ends: |
31 December 1997 |
Value (£): |
161,910
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Summary on Grant Application Form |
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1. Demonstrate improved curve fitting techniques and methods to perform statistically based investigations using response surfaces.2. Demonstrate a strategy that can be used to design processes that are more robust to normal manufacturing variations. 3. Demonstrate a system that can be used to more fully understand existing processes and maintain them.Progress:Designing IC processes that are robust to normal manufacturing variations is of fundamental importance if they are to be commercially successful. This project is targeting the development of techniques that will improve the optimisation process as well as helping process engineers to sustain processes.The issues which are to be investigated are:1. Procedures for determining the location of the required computer generated observations. 2. Procedures for estimating the parameters of the interpolating surrogate function. 3. Specification of the error of prediction for the interpolating function. 4. Conditioning and robustness of the method to numerical errors. This project has just started and a research assistant has been appointed. The initial work has concentrated on interfacing the DFM software to SPICE so that proposed technologies can automatically be simulated from process to circuit performance.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ed.ac.uk |