| EPSRC Reference: |
GR/K32715/01 |
| Title: |
THREE DIMENSIONAL QUANTITATIVE CHARACTERIZATION OF ELECTRONIC MATERIALS FROM BULK TO DOPANT CONCENTRATION |
| Principal Investigator: |
Dowsett, Professor MG |
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| Department: |
Physics |
| Organisation: |
University of Warwick |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 November 1994 |
Ends: |
31 March 1998 |
Value (£): |
163,805
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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Summary on Grant Application Form |
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To combine novel computational methods for multivariate statistical analysis and maximum entropy deconvolution developed at York and Warwick universities and apply the resulting 3-D data characterisation and intercomparison code to the 3-D chemical analysis of electronic micro-structures. To apply newly commissioned Auger (York) and SIMS(Warwick) instrumentation with many novel features and data acquisition modes developed specifically for obtaining high resolution chemical information from materials patterned on a scale down to sub-micron to the 3D analysis of test VLSI device structures. To develop the resulting experimental and computational techniques for the local quantitative analysis of non-planar structures with large lateral and vertical changes in bulk composition and morphology.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.warwick.ac.uk |