Details of Grant 

EPSRC Reference:	GR/K55868/01
Title:	MICROMACHINED QUADRUPOLE MASS SPECTROMETER
Principal Investigator:	Syms, Professor R
Other Investigators:	Tate, Dr T Dorey, Professor H
Researcher Co-Investigators:
Project Partners:	Pre Nexus Migration
Department:	Electrical and Electronic Engineering
Organisation:	Imperial College London
Scheme:	Standard Research (Pre-FEC)
Starts:	01 August 1995	Ends:	31 July 1997	Value (£):	97,578
EPSRC Research Topic Classifications:	Electronic Devices & Subsys. Instrumentation Eng. & Dev.
EPSRC Industrial Sector Classifications:	Manufacturing
Related Grants:
Panel History:
Summary on Grant Application Form
The aim of the proposal is to develop and demonstrate a cheap, compact silicon-based mass spectrometer for use in the next generation of residual gas analysers. The mass-spectrometer will be constructed using recently developed microengineering methods of fabrication, in collaboration with Liverpool University and VG instruments. The overall design of the instrument will be performed at LU. The ion source and mass filter will be developed at IC. The former will be based on the field-emitter array, the latter on an electronically-scanned quadrupole lens. The detector (based a CMOS electrometer) and associated electronics will be developed by LU. Overall assemble of the micromachined structure will be performed by IC, of the complete system by LU.
Key Findings
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Potential use in non-academic contexts
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Further Information:
Organisation Website:	http://www.imperial.ac.uk