| EPSRC Reference: |
GR/K71486/01 |
| Title: |
EXCIMER LASER FABRICATION OF 3D MICROSTRUCTURES - A BASIC STUDY |
| Principal Investigator: |
Lawes, Professor R |
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| Department: |
Central Microstructure Facility |
| Organisation: |
STFC Laboratories (Grouped) |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
11 December 1995 |
Ends: |
10 December 1997 |
Value (£): |
1,014
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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Summary on Grant Application Form |
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Development and validation of a model for projection lithography using excimer lasers in ablation mode, to provide detailed information about the three-dimensional structure produced by particular maks patterns under different process conditions. Experimental work at RAL will provide input data for the modelling at Imperial College, and the validation of the model during its development, The ablation technique has potential in the field of microengineering due to its ability to process a wide range of materials, and to design complex three-dimensional microstructures. The work will aim to establish the ulitmate capabilities of the process.
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Key Findings |
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Potential use in non-academic contexts |
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Impacts |
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| Description |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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