| EPSRC Reference: |
GR/K88538/01 |
| Title: |
DIAMOND FIELD EMITTERS FOR NANOLITHOGRAPHY |
| Principal Investigator: |
Jackman, Professor RB |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Electronic and Electrical Engineering |
| Organisation: |
UCL |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 January 1997 |
Ends: |
31 May 1997 |
Value (£): |
15,049
|
| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
|
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
A hybrid technology is to be explored which combines the throughput advantages of photolithography with the resolution capabilities of electron beam lithography for the formation of nanostructures. The formation of patterns of electron emitters will be investigated by ion or electron beam bombardment of thin film diamond. It is proposed that these could then be used as a mask plate for electron beam lithography.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
|