| EPSRC Reference: |
GR/L50013/01 |
| Title: |
ION BEAM SYNTHESIS OF SIGE HBTS AND HMOSTS FOR HIGH SPEED, LOW POWER COMMUNICATIONS APPLICATIONS |
| Principal Investigator: |
Hemment, Professor P |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Sch of Electronics & Physical Sciences |
| Organisation: |
University of Surrey |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 July 1997 |
Ends: |
31 March 2001 |
Value (£): |
244,839
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Materials Synthesis & Growth |
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Summary on Grant Application Form |
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This research proposal offers a novel, low risk process using Ge+ and dopant ion implantation to synthesise and dope Si/SiGe/Si heterostructures for advanced HBT, HMOS and mixed technology circuits, as an alternative to CVD or MBE deposition. The proposal draws upon the applicant's experience of SOI/SIMOX technology and more recent successes in synthesising high quality Si/SiGe/Si heterostructures. Specific issues to be addressed include (a) development of novel process and device designs which exploit the graded interfaces of the Ge and dopant profiles in the synthesised structures and (b) control of dopant TED during RTA and strain related extended defects. Pseudomorphic structures will be synthesised and pnp and npn HBTs will be fabricated and characterised. The principal deliverable will be a fully characterised synthesised pnp HBT, to facilitate the realisation of a complementary bipolar technology. Pseudomorphic layers and relaxed virtual substrates will be synthesised and assessed, both structurally and electrically, for application to advanced n- and p-channel HMOSTs. Project reviews are included to enable priorities to be redefined at critical stages. The workplan is fully integrated with the parallel HBT and HMOS programmes. There is common project management with the HBT project and close technical interaction with GPS, SILVACO, applied Materials and DRA.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.surrey.ac.uk |