| EPSRC Reference: |
GR/M85180/01 |
| Title: |
HYDROGEN IN SEMICONDUCTOR SILICON |
| Principal Investigator: |
Peaker, Professor AR |
| Other Investigators: |
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| Department: |
Electrical Engineering & Electronics |
| Organisation: |
UMIST |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
06 January 2000 |
Ends: |
05 January 2003 |
Value (£): |
273,446
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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Summary on Grant Application Form |
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Although hydrogen is known to have a crucial role in amorphous silicon technologies it is only very recently that its significance in single crystal silicon material and devices has become apparent. It is now well established that hydrogen is introduced into silicon by many processes used in the semiconductor industry. The work proposed under this contract aims to quantify the effect of hydrogen in single crystal silicon in relation to its role in reacting with transition metals, impurities and intrinsic defects. Predictions can then be made in relation to the use of hydrogen for novel semiconductor technologies and the stability of device characteristics where hydrogen plays a role. It is considered that this is a very appropriate time to launch such a study as the new technique of high resolution (Laplace) DLTS and major developments in ab initio calculations of defect properties are now available and will be applied in this study in conjunction with the results from previous optical studies. As hydrogen can exist in many forms in silicon we also aim to quantify hydrogen in silicon in terms of the concentrations bonded to defects, impurities and surfaces and that present in molecular form.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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