| EPSRC Reference: |
GR/M89485/01 |
| Title: |
ULTRASTABLE SUPERRESOLVING HOLOGRAPHIC PROFILER |
| Principal Investigator: |
See, Dr C |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Electrical and Electronic Eng |
| Organisation: |
University of Nottingham |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 March 2000 |
Ends: |
28 February 2003 |
Value (£): |
200,030
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Electronics |
| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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This project will demonstrate a novel optical profiler capable of unparalleled stability for an absolute phase interferometer. The system is almost totally common path ensuring stability of both amplitude and phase measurements. The key element is a computer generated hologram which splits the beam to form probe and reference beams. We will also demonstrate that the system can be made to operate in beam scanning mode by scanning the optical hologram. This will greatly improve the versatility of the system. The system will be demonstrated for measurement of surface roughness and critical dimension measurement. The exceptional stability and thus signal to noise of our system combined with the capability of simultaneously and accurately measuring phase and amplitude makes it particularly suited for the application of spectral extension methods. This will be the first time these methods have been applied to a microscope system with the necessary specification to extend the lateral resolution beyond that obtainable with far field methods. Various methods of spectral extension will be applied and tested on different sample. Tracks on samples with linewidths approaching 100nm will be measured using 430nm radiation.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.nottingham.ac.uk |