| EPSRC Reference: |
GR/N19564/01 |
| Title: |
DEVELOPMENT AND EXPLOITATION OF A COMMERCIAL PLASMA OXIDATION SYSTEM |
| Principal Investigator: |
Eccleston, Professor W |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Electrical Engineering and Electronics |
| Organisation: |
University of Liverpool |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 May 2000 |
Ends: |
31 January 2003 |
Value (£): |
249,108
|
| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
Plasmas - Technological |
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
The project involves collaboration with STS, a UK based company specialising in semiconductor equipment, particularly involving plasma processing. They will provide input into the design of the machine, will lend equipment to the project, will be involved in critical assessment of the data, and cash. Plasma oxidation has been shown to be an effective way of oxidising at very low temperatures, a wide range of silicon based materials (SiC, SiGe, a-Si, poly-Si). Cleaning is believed to be a crucial step. The purpose of this proposal is to scale up the system for larger slices, to create a geometry that is consistent with easy loading, to study the properties of the oxides so produced, and to optimise performance prior to undertaking a paper study of a final machine.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.liv.ac.uk |