| EPSRC Reference: |
GR/N32969/01 |
| Title: |
FUTURE TECHNOLOGIES FOR THE ELECTRICAL ISOLATION OF III-V SEMICONDUCTOR DEVICES |
| Principal Investigator: |
Sealy, Professor B |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Sch of Electronics & Physical Sciences |
| Organisation: |
University of Surrey |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2000 |
Ends: |
30 September 2003 |
Value (£): |
125,423
|
| EPSRC Research Topic Classifications: |
| Materials Characterisation |
Materials Processing |
|
| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
A systematic approach to III-V semiconductor electrical isolation via ion implantation is required by the Surrey Ion Beam Centre. We therefore propose a dedicated project investigating the physics and applications of implant isolation. Defect/dopant interaction will be studied through the correlation of point defect concentration and the electrical properties of implanted material. New methods for the efficient isolation of In-based and narrow band-gap materials will be developed on simple test structures. These methods will be applied and tested on real devices for which the need for a planar isolation process has been highlighted, and for which no process currently exists. The results will be summarised in a predictive PC program developed to provide recipes for isolation of devices varying in composition, doping type/concentration and depth.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.surrey.ac.uk |