| EPSRC Reference: |
GR/N39364/01 |
| Title: |
VALIDATION OF SHALLOW JUNCTIONS BY STM |
| Principal Investigator: |
Silva, Professor SRP |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Electronics & Physical Sciences |
| Organisation: |
University of Surrey |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 February 2001 |
Ends: |
31 March 2003 |
Value (£): |
330,915
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Materials Characterisation |
| Materials Synthesis & Growth |
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| Panel History: |
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Summary on Grant Application Form |
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Strip and Hall is a very mature technique for obtaining the dopant profiles in semiconductor device structures. We propose a new variant, strip and STM. STM of clean surfaces is able to detect the x-y and z- distribution of subsurface charged dopants by the position and strength respectively of their Coulomb field at the surface. We will strip off very few layers at a time, and use STM to monitor and correlate subsequent STM images to detect deep-lying dopants approaching the surface. From this we will reconstruct the 3D dopant distribution, and we will investigate edge and corner effects in very small devices, providing models for ion-implantation of ultra small volumes of material. Several challenges have to be overcome, relating to surface cleanliness and the registration of the region under test during repeated strip and STM processing.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.surrey.ac.uk |